| Customization: | Available |
|---|---|
| Main Application: | Water, Nature Gas |
| Sensor: | Plug-in |
Suppliers with verified business licenses
Audited by an independent third-party inspection agency


Model Number | AC 0 Series | MC 0 Series | DC 1 Series | PC 2 Series | DNC 3 Series | ECC 4 Series | ENC 5 Series | PFC 6 Series | |
Performances | |||||||||
Full Scale (N2 Eqv) | LOW: 2-5000 SCCM MID: | ||||||||
5SLM-50 SLM | |||||||||
Control Range | Single Gas: Range Ratio 50:1 100:1 SelectableMulti-Gas Multi-Range: 50:1 Range Ratio | ||||||||
Response Time | ≤ 1.0Sec | ||||||||
Accurate | ≤ ±1%Of Full Scale | ≤ ±1% Of Set Value (35%-100% Of Full Scale) | |||||||
≤ ±0.3% Of Full Scale (2%-35% Of Full Scale) | |||||||||
Linearity | ≤ ±0.5% Of Full Scale | ||||||||
Repeatable | ≤±0.3%Ofthefullscalerange | ||||||||
Regular Working Pressure | (LOW) (:) (0.05-0.3) (MPa)MID0.07-0.3 MP: A(5SLM-23SLM) | ||||||||
0.14-0.3 MPa (25SLM-50SLM) | |||||||||
Maximum Working Pressure | 0.6 MPa | ||||||||
Pressure Resistance | Rubber: Max 1.03 MPa M Et A L : Max 3 MPa | ||||||||
Leakage Rate | :Max 1*10(-) (10)Pa.M3/Sec(He)Metal: Max 5*10-12Pa.M3/Sec(He) | ||||||||
Operating | 5-50 DegC | ||||||||
Temperature | |||||||||
Mechanical Configuration | |||||||||
Valve Type | Normally Closed | ||||||||
Seal Up | Fluorine Rubber / Metal (Metal)W-Type / C-Type/ Nickel Sheet | ||||||||
Makings | Stainless Steel 316L, PTFE, Magnet Stainless Steel | ||||||||
Terminal (Electrical | 1/4"VCR Or 1/4" Swagelok Compatible1.125 "C" Type Seal1.5 "C" Type Seal | ||||||||
Engineering) | 3/8"VCR Or 3/8" Swagelok Compatible1.125 "W" Seal1.5 "W" Seal | ||||||||
Mounting Position | Any Position | ||||||||
Surface Treatment | ≤5RAEP Processing (Gas Holder, Connector, Sensor) Optional Ra=0.2,0.4,0.6μM | ||||||||
Electrical Configuration | |||||||||
ProfiBus-DP : Bus : 9P-DSub | |||||||||
Electrical Signals | 0-5VDC: 9P- | 0-5VDC: 9P- | 0-5VDC: 9P- | (F) *1 | DeviceNet : 5-Pin | EtherCAT: RJ45 *2 | Ethernet/IP: RJ45 | ProfiNet: RJ45 *2 | |
DSub *1 | DSub *1 | DSub *1 | Power : 9P- DSub (M) *1 | M12 *1 RJ11 *1 | 5-Pin M8 *1 | *2 | 5-Pin M8 *1 | ||
Modbus: RJ11 | RJ11 *2 | 5-Pin M8 *1 | |||||||
*2 | |||||||||
Input Power | +15VDC ±2% At 50MA | ||||||||
-15VDC ±2% At 250MA Maximum | |||||||||
+24VDC ±15% At 240MA Maximum | |||||||||
Power Wastage | 3.5W - 4.5W | ||||||||
Options (As In Computer Software Settings) | |||||||||
Integrated Control Board | OLED Screen For Reading, Controlling And Totalizing Gas Flows | ||||||||
Multi-Gas Multi-Range | N2 EGv Full-scale Flow: Mult-0:10SCCM; MUIt-1:30SCCM; MUt-2:100SCCM; MUIG-3:300SCCM;MUt-4:1000SCCM | ||||||||
Multi-5:3SL M;Multi-6:5SL M;Multi-7:10SL M;Multi-8:30SL M;Multi-9:50SL M | |||||||||




